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Clean Room Specification

Cleanroom Specification- FED ST.209E Standards

Class Name 0.1㎛/ft3 0.2㎛/ft3 0.3㎛/ft3 0.5㎛/ft3 5.0㎛/ft3
Class 1 35 2.14 3 1 -
Class 10 350 21.4 30 10 -
Class 100 - 214 300 100 -
Class 1,000 - 2140 - 1,000 7
Class 10,000 - - - 10,000 70
Class 100,000 - - - 100,000 700

Cleanroom Specification –ISO 14644 Standards

Class Name 0.1㎛/ft3 0.2㎛/ft3 0.3㎛/ft3 0.5㎛/ft3 1.0㎛/ft3
Class 1 10 2 - - -
Class 2 100 24 - 4 -
Class 3 1,000 237 10 35 8
Class 4 10,000 2,370 102 352 83
Class 5 100,000 23,700 1,020 3,520 832
Class 6 1,000,000 237,000 10,200 35,200 8,320
Class 7 - - 102 x 103 352 x 103 83,200
Class 8 - - - 352 x 104 832 x 103
Class 9 - - - 352 x 105 832 x 104

Classification of Cleaner Works Rooms - Based on EN/ISO 14644-1 Standards

Grade Maximum allowed particulates per ㎥
(The size of the particulate is equal to or greater than the size of each particle specified in the table.)
  At lest In operation
  0.5㎛ 5㎛ 0.5㎛ 5㎛
A 3520 20 3520 20
B 3520 29 352000 2900
C 352000 2900 3520000 29000
D 3520000 29000    

Recommended limit standards for monitoring microbes in clean area during operation

Grade Recommended limit standard for microbial contamination (average)
  Floating bacteria
cfu/m3		 Parachute
(90mm in diameter),
cfu/4hours2		 Surface Bacteria
(55 mm in diameter),
cfu/plate		 Glove Print Five Fingers cfu/glove
A ＜ 1 ＜ 1 ＜ 1 ＜ 1
B 10 5 5 5
C 100 50 25 -
D 200 100 50 -